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Extreme measures

Extreme measures

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In 1988, chipmaking could have made a big leap that promised to secure its future all the way down to process technologies not due to appear until 2020. This paper shows how extreme ultraviolet lithography has struggled to become a tool for chipmaking, despite the increasingly arcane workarounds for conventional tools.

http://iet.metastore.ingenta.com/content/journals/10.1049/et.2010.0706
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