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Closed form expressions for RF MEMS switch actuation and release time

Closed form expressions for RF MEMS switch actuation and release time

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Closed form expressions for RF MEMS switch actuation and release times are derived. The expressions account for the mechanical and electrical parameters and are valid for V>1.15 VP and Q>0.1 where V is the actuation voltage, VP is the pull-in voltage, and Q is the mechanical quality factor.

References

    1. 1)
      • G. Rebeiz . (2003) RF MEMS: theory, design, and technology.
    2. 2)
    3. 3)
      • Muldavin, J., Rebeiz, G.: `Nonlinear electro-mechanical modeling of MEMS switches', 2001 IEEE MTT-S Int. Microwave Symp. Dig., May 2001, Phoenix, AZ, USA, p. 2119–2122.
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