Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

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Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

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Low-loss coplanar waveguide (CPW) transmission lines integrated on a standard (5–10 Ω · cm) silicon substrate are realised by using an artificial dielectric shield with a very high in-plane dielectric constant. The shield consists of a 30 nm-thick Al2O3 film sandwiched by two 100 nm-thick aluminium layers patterned into lattices of µm-size elements. The individual metallic elements are micro-patterned to suppress the flow of eddy currents at microwave frequencies. Inserted below the CPW, the shield blocks the electric field of the line from entering the silicon substrate. The resulting line attenuation (measured up to 25 GHz) is comparable to that of identical CPWs built on a high-resistivity silicon wafer.

Inspec keywords: eddy currents; coplanar transmission lines; coplanar waveguides; electric fields; microwave integrated circuits; system-on-chip

Other keywords: Si; high-resistivity silicon wafer; low-loss on-chip transmission lines; microwave frequency; electric field; size 30 nm; eddy currents; coplanar waveguide; size 100 nm; micropatterned artificial dielectric shield; Al2O3

Subjects: Electromagnetic induction; Waveguides and microwave transmission lines; Microwave integrated circuits

References

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    2. 2)
      • Y. Ma , B. Rejaei , Y. Zhuang . Artificial dielectric shields for integrated transmission lines. IEEE Microw. Wirel. Compon. Lett.
    3. 3)
      • Awai, I., Kubo, H., Iribe, T., Wakamiya, D., Sanada, A.: `An artificial dielectric material of huge permittivity with novel anisotropy and its application to a microwave BPF', Int. Microwave Symp. Dig. 2003, IEEE MTT-S, 2, p. 1085–1088.
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