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Half-coaxial-like transmission line using benzo cyclo butene layer

Half-coaxial-like transmission line using benzo cyclo butene layer

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A simple and successful design for a half-coaxial-like transmission line using benzo cyclo butene (BCB) is presented. The proposed half-coaxial transmission line was fabricated using a conventional surface micromachining without additional removal of the sacrificial layer. The measured half-coaxial transmission line showed less than 1 dB/cm loss at 20 GHz. Simulated results using CPW modelling are compared with measured data and good agreement is reported.

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