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CMOS-compatible optical rib waveguides defined by local oxidation of silicon

CMOS-compatible optical rib waveguides defined by local oxidation of silicon

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The local oxidation of silicon process is shown to be an effective means of defining optical rib waveguides in silicon on insulator while maintaining the surface planarity required for CMOS integration. Experimental waveguides have shown singlemode operation and losses of less than 1 dB/cm in the telecommunications band around 1550 nm.


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