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Approach to improve ZnO-based FBAR devices

Approach to improve ZnO-based FBAR devices

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Presented is a new technique to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors into which ultra-thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. This technique resulted in excellent device improvement in terms of return loss and Q-factors.

References

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      • S.V. Krishnaswamy , J.F. Rosenbaum , S.S. Horwitz , R.A. Moore . Film bulk acoustic wave resonator and filter technology. IEEE MTT-S Dig. , 153 - 155
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      • M. Yim , D.H. Kim , D. Chai , G. Yoon . Significant resonance characteristic improvements by combined used of thermal annealing and Co electrode in ZnO-based FBARs. Electron. Lett. , 23 , 1638 - 1640
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      • M. Yim , D.H. Kim , D. Chai , G. Yoon . Effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes. J. Vac. Sci. Technol. , 3 , 465 - 471
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      • L. Mai , H.-I. Song , L.M. Tuan , P.V. Su , G. Yoon . A comprehensive investigation of thermal treatment effects on resonance characteristics in FBAR devices. Micrw. Opt. Technol. Lett. , 5 , 459 - 462
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