MCVD planar substrates for UV-written waveguide devices

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MCVD planar substrates for UV-written waveguide devices

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A method for fabricating planar silica substrates via modified chemical vapour deposition (MCVD) and a modified fibre drawing technique is presented. Long lengths of planar material are generated from a single substrate offering a potentially low-cost alternative to existing planar substrate deposition processes. Buried straight and splitting waveguide channels, as well as Bragg gratings, are inscribed in the planar material using direct UV-writing technology, and the results are reported.

Inspec keywords: optical beam splitters; optical planar waveguides; chemical vapour deposition; silicon compounds; substrates; drawing (mechanical); optical fabrication; Bragg gratings

Other keywords: optical fibre; planar silica substrates; straight waveguide channels; buried channel waveguides; modified chemical vapour deposition; MCVD planar substrates; Bragg gratings; UV-written waveguide devices; SiO2; splitting waveguide channels; modified fibre drawing technique

Subjects: Optical fabrication, surface grinding; Chemical vapour deposition; Integrated optics; Gratings, echelles; Optical beam splitters; Chemical vapour deposition; Optical waveguides; Optical waveguides and couplers; Integrated optics

References

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      • Y. Wu , H. Xin , L. Zhang , Z. Zhuo , Y. Yu , W. Zheng , G. Liu , Y. Zhang . Fabrication of planar optical waveguide material on silicon by flame hydrolysis deposition. Proc. SPIE - Int. Soc. Opt. Eng. (USA)
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    4. 4)
    5. 5)
      • S.R. Nagel , J.B. Macchesney , K.L. Walker . Overview of the modified chemical vapour deposition (MCVD) process and performance. J. Quantum Electron. , 4 , 459 - 476
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