Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35)O3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300°C, much lower than the typically reported 650°C for deposition on platinum.
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http://iet.metastore.ingenta.com/content/journals/10.1049/el_20063422
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