RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

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RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

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Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35)O3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300°C, much lower than the typically reported 650°C for deposition on platinum.

Inspec keywords: sputter deposition; gold; ferroelectric devices; X-ray diffraction; ferroelectric thin films; piezoelectric thin films; lead compounds; piezoelectric transducers; strontium compounds; scanning electron microscopy; X-ray photoelectron spectra

Other keywords: X-ray diffractometry; ferroelectric transducers; piezoelectric transducers; RF magnetron sputtering; Pb0.92Sr0.08(Zr0.65Ti0.35)O3-Au; scanning electron microscopy; X-ray photoelectron spectroscopy; perovskite phase; PSZT thin-films; 300 C

Subjects: Piezoelectric devices; Sputter deposition; Ferroelectric devices; Deposition by sputtering; Thin film growth, structure, and epitaxy; Sensing devices and transducers

References

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      • Holland, A.S., Kandasamy, S., Fardin, E., Mitchell, A., McCulloch, D.: `Formation of lead lanthanum zirconate titanate films by heat treatments', COMMAD, 2004, Brisbane, Australia.
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      • T.S. Kim , D.J. Kim , H.J. Jung . N2O reactive gas effect on RF magnetron sputtered Pb(Zr0.52Ti0.48)O3 thin films. J. Appl. Phys. , 7024 - 7028
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      • C. Suryanarayan , M.G. Norton . (1998) X-ray diffraction: a practical approach.
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      • H. Zheng , I.M. Reaney , W.E. Lee , N. Jones , H. Thomas . Surface decomposition of strontium-doped soft PbZrO3-PbTiO3. J. Am. Ceram. Soc. , 207 - 212
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      • Powder Diffraction Pattern File (PDF), JCPDS-ICCD, Swarthmore, PA 19081, USA.
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