Kalman filter applications to laser interferometer measurements in position-servo systems

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Kalman filter applications to laser interferometer measurements in position-servo systems

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Kalman filters to reduce the measurement errors of the laser interferometer are designed by exploiting the information of displacements in position-servo systems. The output of the interferometer is assumed to be the sum of a real displacement and a Markov process noise. Two types of displacements are considered and state-space models for them are established. Kalman filters based on these models are designed and experimental results are presented to show the effectiveness of the suggested scheme.

Inspec keywords: measurement by laser beam; measurement errors; Kalman filters; position control; position measurement; Markov processes; servomechanisms; light interferometers

Other keywords: laser interferometer measurements; Markov process noise; Kalman filter; position-servo systems; measurement errors; state-space models; real displacement

Subjects: Markov processes; Spatial variables control; Metrological applications of lasers; Probability theory, stochastic processes, and statistics; Filtering methods in signal processing; Actuating and final control devices; Optical interferometry; Spatial variables measurement; Servo and control devices; Metrological applications of lasers; Spatial variables measurement; Markov processes

References

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    2. 2)
      • R.G. Brown , P.Y.C. Hwang . (1992) Introduction to random signals and applied Kalman filtering.
    3. 3)
      • N. Bobroff . Recent advantages in displacement measuring interferometry. Meas. Sci. Technol. , 907 - 926
http://iet.metastore.ingenta.com/content/journals/10.1049/el_20061572
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