Humidity sensors made on polyvinyl-alcohol film coated SAW devices

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Humidity sensors made on polyvinyl-alcohol film coated SAW devices

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© The Institution of Engineering and Technology
Published

Highly sensitive surface acoustic wave (SAW) humidity sensors were fabricated by spin-coating polyvinyl-alcohol (PVA) thin film on the SAW resonators. The transmission properties of the SAW sensor, including centre frequency and insertion loss, were investigated at a relative humidity ranging from 30 to 90%. The results justify the suitability for the PVA film coated SAW resonators in the application of sensing humidity at a higher relative humidity.

Inspec keywords: surface acoustic wave resonators; surface acoustic wave sensors; humidity sensors; spin coating; polymer films

Other keywords: insertion loss; transmission properties; centre frequency; spin coating polyvinyl alcohol thin film; SAW resonators; surface acoustic wave; humidity sensors

Subjects: Hygrometry; Sensing and detecting devices; Sensing devices and transducers; Acoustic wave devices; Humidity measurement

References

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