Long range wireless characterisation of 2.4 GHz SAW-based pressure sensor using network analyser

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Long range wireless characterisation of 2.4 GHz SAW-based pressure sensor using network analyser

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A 2.4 GHz range surface acoustic wave (SAW)-based pressure sensor was fabricated on a 41° YX LiNbO3 substrate for a mechanical compression force measurement. For the first time, fabricated sensors were characterised wirelessly using the network analyser. Electron beam lithography was used for fine line patterning. Metal ground shielding was covered all over the cavity to reduce a coupling loss of the propagating SAW to the surrounding atmosphere. Equivalent circuit model and finite element methods were used to determine optimal design parameters. The three sharp peaks were obtained from three reflectors. As a mechanical force was applied to the piezoelectric diaphragm, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. Obtained sensitivity was 2.9°/kPa.

Inspec keywords: equivalent circuits; lithium compounds; electron beam lithography; pressure sensors; surface acoustic wave sensors; force measurement; UHF measurement; finite element analysis; niobium compounds

Other keywords: coupling loss; finite element methods; fine line patterning; electron beam lithography; metal ground shielding; force measurement; equivalent circuit model; 2.4 GHz; network analyser; mechanical compression; wireless characterisation; optimal design parameters; SAW pressure sensor

Subjects: Sensing and detecting devices; Microwave measurement techniques; Measurement by acoustic techniques; Finite element analysis; Pressure and vacuum measurement; Acoustic wave devices; Pressure measurement; Numerical approximation and analysis; Sensing devices and transducers

References

    1. 1)
      • Schimetta, G., Dollinger, F., Scholl, G., Weigel, R.: `Optimized design and fabrication of a wireless pressure and temperature sensor unit based on SAW transponder technology', IEEE MTT-S Microwave Symp., 2001, Phoenix, AZ, USA, p. 355.
    2. 2)
      • L. Reindl , A. Pohl , G. Scholl , R. Weigel . SAW based radio sensor systems. IEEE Sens. J. , 1
    3. 3)
      • Scherr, H., Scholl, G., Seifert, F., Weigel, R.: `Quartz pressure sensor based on SAW reflective delay line', IEEE Ultrasonics Symp., November 1996, 1, p. 347.
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