An analysis based on simulation of polarisation depedence and the singlemode condition for small and deeply etched silicon-on-insulator waveguide dimensions is presented. Examples of designs that satisfy both requirements simultaneously have been evaluated using the three-dimensional full vectorial beam propagation method.
References
-
-
1)
-
Beamprop by RSOFT Design Group Inc., 200 Executive Group Blvd., Ossining, NY 19562.
-
2)
-
S.P. Pogossian ,
L. Vescan ,
A. Vonsovici
.
The single-mode condition for semiconductor rib waveguides with large cross section.
J. Lightwave Technol.
,
1851 -
1853
-
3)
-
J. Lousteau
.
The single-mode condition for silicon-on-insulator optical rib waveguides with large cross section.
J. Lightwave Technol.
,
1923 -
1929
-
4)
-
R.A. Soref ,
J. Schmidtchen ,
K. Petermann
.
Large single-mode rib waveguides in Ge-Si and Si-on-SiO2.
IEEE J. Quantum Electron.
,
1971 -
1974
http://iet.metastore.ingenta.com/content/journals/10.1049/el_20058198
Related content
content/journals/10.1049/el_20058198
pub_keyword,iet_inspecKeyword,pub_concept
6
6