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Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications

Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications

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  • Author(s): Y.H. Cho 1 ; M.-L. Ha 2 ; W. Choi 3 ; C. Pyo 3 ; Y.-S. Kwon 2
    • View affiliations
    • Affiliations: 1: School of Information and Communication Engineering, Mokwon University, Seo-gu, Republic of Korea
      2: Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology (KAIST), Yuseong-gu, Republic of Korea
      3: RFID Technology Research Team, Electronics and Telecommunications Research Institute (ETRI), Yuseong-gu, Republic of Korea
  • Source: Volume 41, Issue 1, 6 January 2005, p. 5 – 6
    DOI:  10.1049/el:20057307 , Print ISSN 0013-5194, Online ISSN 1350-911X
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Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.

Inspec keywords: millimetre wave devices; antenna radiation patterns; micromachining; microstrip lines; micromechanical devices; microstrip antennas

Other keywords: high resistivity silicon substrate; rectangular patches; reflection coefficients; microelectromechanical system; millimetre wave applications; Si; floating patch MEMS antennas; broadband wireless access; surface micromachining technology; metallic posts; microstrip lines; radiation patterns

Subjects: Antennas; Waveguides and microwave transmission lines; Fabrication of MEMS and NEMS devices; Solid-state microwave circuits and devices

References

    1. 1)
    2. 2)
      • J.-M. Lee , Y.-H. Cho , C.-S. Pyo , I.-G. Choi . A 42-GHz wideband cavity-backed slot antenna with thick ground plane. ETRI J. , 3 , 262 - 264
    3. 3)
    4. 4)
      • Ha, M.-L., Cho, Y.H., Pyo, C.-S., Kwon, Y.-S.: `Q-band micro-patch antennas implemented on a high resistivity silicon substrate using the surface micromachining technology', 2004 IEEE Microwave Theory Techniques Society Digest, June 2004, p. 1189–1192.
    5. 5)
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