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Picolitre acoustic droplet ejection by femtosecond laser micromachined multiple-orifice membrane-based 2D ejector arrays

Picolitre acoustic droplet ejection by femtosecond laser micromachined multiple-orifice membrane-based 2D ejector arrays

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Described is a new method of generating droplets by using the higher-order resonance mode shape displacement of a two-dimensional (2D) silicon nitride membrane array with multiple orifices, fabricated by a femtosecond laser. This higher-order resonance ejection method increases the flow rate per membrane on a 2D ejector array and introduces the capability to eject from various locations on a membrane. Combined with the simplicity and the functionality of femtosecond laser micromachining, the novel devices are especially well suited for continuously generating picolitre droplets for various applications in biotechnology and the semiconductor industry.

Inspec keywords: drops; micromachining; microfluidics; silicon compounds; acoustic devices; orifices (mechanical); acoustic applications; membranes; piezoelectric transducers; laser beam machining

Other keywords: Si3N4; resonance ejection method; femtosecond laser micromachining; picoliter acoustic droplet ejection; multiple-orifice membranes; 2D silicon nitride membrane array; picoliter droplets; higher-order resonance mode shape displacement; 2D ejector arrays

Subjects: Laser materials processing; Fabrication of MEMS and NEMS devices; Laser materials processing; Micromechanical and nanomechanical devices and systems; Sonic and ultrasonic applications; Design and modelling of MEMS and NEMS devices

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