Fast switching bistable electromagnetic microactuator

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Fast switching bistable electromagnetic microactuator

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A fast switching electromagnetic microactuator with two stable positions is presented. The actuator of size 2.0×2.2 mm is fabricated using UV-LIGA technology. Test results show that a current pulse with an amplitude of 50 mA is needed for the actuator's switching between two stable states, and the switching time is approximately 20 µs. The displacement of the actuator is about 17 µm.

Inspec keywords: ultraviolet lithography; electromagnetic actuators; LIGA; stability; microactuators

Other keywords: 5 mA; microactuator bistability; UV-LIGA technology; fast switching electromagnetic microactuator; ultraviolet lithography

Subjects: Fabrication of MEMS and NEMS devices; Microactuators; Electromagnetic device applications

References

    1. 1)
      • Y.H. Zhang , G.F. Ding , X.L. Zhao , J. Ma , B.C. Cai . Micromechanical structure design of electromagnetically actuated bistable RF micro-electro-mechanical systems switches. J. Shanghai Jiaotong Univ. , 5 , 725 - 728
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http://iet.metastore.ingenta.com/content/journals/10.1049/el_20052703
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