Low temperature measurements of Schottky-barrier SOI-MOSFETs with dopant segregation

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Low temperature measurements of Schottky-barrier SOI-MOSFETs with dopant segregation

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Temperature dependent experimental results of Schottky-barrier MOSFETs with dopant segregation using fully nickel silicided source and drain contacts are presented. The dependence of the extracted effective Schottky-barrier height (SBH) on the gate voltage clearly shows that use of dopant segregation lowers the effective SBH for electron injection significantly from 0.64 eV down to ∼0.1 eV.

Inspec keywords: MOSFET; silicon-on-insulator; Schottky barriers; cryogenic electronics; charge injection; semiconductor doping

Other keywords: fully nickel silicided drain contacts; gate voltage; dopant segregation; low temperature measurements; Schottky barrier height; NiSi; electron injection; fully nickel silicided source contacts; SOI-MOSFET

Subjects: Semiconductor doping; Metal-insulator-semiconductor structures; Semiconductor-metal interfaces; Insulated gate field effect transistors

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