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External circuit system effects on chlorine plasma instabilities

External circuit system effects on chlorine plasma instabilities

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The effects of the external circuit on plasma instabilities in an inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasma coupling provides an explanation of the asymetry.

Inspec keywords: equivalent circuits; plasma instability; antennas in plasma; plasma sources; chlorine; electric impedance; plasma chemistry

Other keywords: circuit input impedance; chlorine plasma instability; external circuit system; Cl; antenna plasma coupling; asymmetric instability; inductive plasma source

Subjects: Plasma reactions; Plasma sources; Plasma instabilities; Antennas; Antennas in plasma; plasma-filled wave guides

References

    1. 1)
    2. 2)
      • P. Chabert , A.J. Lichtenberg , M.A. Lieberman , A.M. Marakhtanov . Instabilities in low-pressure electronegative inductive discharges. Plasma Sources Sci. Technol.
    3. 3)
    4. 4)
      • M.A. Lieberman , A.J. Lichtenberg . (1994) Plasma for physics for materials processing.
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