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Micromachined 2D nanoelectrospray emitter

Micromachined 2D nanoelectrospray emitter

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A novel 2D nanoelectrospray emitter for mass spectrometry has been micromachined using photoresist SU-8 on silicon substrates using one-step photomasking. The design contains a reservoir, a capillary slot and an emitter tip. The emitters were successfully tested on an ion trap mass spectrometer. A nanoelectrospray was observed at voltages as low as 0.8 kV.

Inspec keywords: micromachining; microfluidics; mass spectrometer accessories; particle traps

Other keywords: Si; micromachined 2D nanoelectrospray emitter; capillary slot; microfluidics; electrospray ionisation; emitter tip; one-step photomasking; reservoir; 0.8 kV; mass spectrometry; ion trap mass spectrometer; SU-8 photoresist; nanoelectrospray operating voltage; ESI

Subjects: Ion sources: positive, negative and polarized; Particle spectrometers; Mass spectrometers and mass spectrometry techniques; MEMS and NEMS device technology

References

    1. 1)
      • M. Koch , A. Evans , A. Brunnschweiler , R. Pethig . (2000) , Microfluidic technology and applications.
    2. 2)
      • C.-H. Lin , G.-B. Lee , B.-W. Chang , G.-L. Chang . A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photo resist. J. Micromech. Microeng. , 590 - 597
    3. 3)
    4. 4)
      • L. Lin , P. Pisano . Silicon processed micro-needles. IEEE J. Micromech. Sys. , 78 - 84
    5. 5)
      • D. Figeys , D. Pinto . Proteomics on a chip: promising developments. Electrophoresis , 208 - 216
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