http://iet.metastore.ingenta.com
1887

Fabrication of PRTs and analysis of characteristics

Fabrication of PRTs and analysis of characteristics

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

Platinum thin films have been prepared on Al2O3 substrates by DC magnetron sputtering. Platinum resistance thermometers have been fabricated and their characteristics analysed. We used a UV laser (wavelength 355 nm) to adjust the Pt thin films temperature sensors to 100 Ω at 0°C. As result of setting the Pt resistors to the target value of 109.73 Ω at 25°C, 82.3% of total resistors had a tolerance within ±0.03 Ω and 17.7% were within ±0.06 Ω of A-class tolerance according to DIN EN 60751. The PRTs which were fabricated in this research had excellent characteristics such as high accuracy, long-term stability, wide temperature range, good linearity, good repeatability and rapid response time.

References

    1. 1)
      • J. Zhang , Y. Nagao , S. Kuwano , Y. Ito . Microstructure and temperature coefficient of resistance of platinum films. Jpn. J. Appl. Phys. , 834 - 839
    2. 2)
      • Dubowski, J.J.: `Laser technologies for manufacturing of advanced materials and devices', Proc. SPIE – Int. Soc. Opt. Eng., 2000, USA, 3933, p. 58–61.
    3. 3)
      • Swenson, E.J., Sun, Y., Dunsky, C.: `Laser micromachining in the microelectronics industry: a historical overview', Proc. SPIE – Int. Soc. Opt. Eng., 2000, USA, 4095, p. 118–132.
    4. 4)
      • M. Aslam , J.A. Mirza . Thick film technology and its application in telecommunication systems. Sn Int. J. of the Commission on Science and Technology for Sustainable Development in the South (COMSTATS)
    5. 5)
      • Dubowski, J.J.: `Laser-induced microstructuring of photonic materials: semiconductors', Proceedings SPIE, 2000, 4088, p. 55–63.
    6. 6)
      • Garfias, L.F., Siconolfi, S.J., Crane, G.R., Comizzoli, R.B., Peins, G.A.: `Reliability characterization of RuO', Proc. Fourth Int. Symp. (Electrochemical Society Proceedings), 1999, USA, 99–29, p. 217–230.
    7. 7)
      • Meunier, M., Gagnon, Y., Savaria, Y., Lacourse, A., Cadotte, M.: `A novel laser trimming technique for microelectronics', Proc. SPIE – Int. Soc. Opt. Eng., 2001, USA, 4274, p. 385–392.
http://iet.metastore.ingenta.com/content/journals/10.1049/el_20030755
Loading

Related content

content/journals/10.1049/el_20030755
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address