High temperature surface acoustic wave devices: fabrication and characterisation

High temperature surface acoustic wave devices: fabrication and characterisation

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Langasite (LGS) and quartz surface acoustic wave devices have been fabricated and tested up to 750°C, for frequency control applications and sensors. The measured magnitude of the transmission coefficient (|S21|) and temperature coefficient of frequency (TCF) are compared to numerical predictions and verify quantitatively that the fabricated LGS devices maintain good operation up to 750°C, whereas quartz devices rapidly degrade at around 580°C due to the alpha–beta (α to β) transition.


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