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Thin-film bulk acoustic resonator RF bandpass filter design technique using genetic algorithm

Thin-film bulk acoustic resonator RF bandpass filter design technique using genetic algorithm

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A thin-film bulk acoustic resonator (FBAR) filter design technique based on the genetic algorithm (GA) is proposed. Instead of using the approximate Butterworth-Van Dyke (BVD) model, the GA is used to optimise the structure of each FBAR with its exact analytical impedance expressions. US-PCS Rx/Tx bandpass filters, obtained by the proposed method, exhibit better response than those obtained by the BVD model.

References

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      • Lakin, K.M., Kline, G.R., McCarron, K.T.: `Thin film bulk acoustic wave filters for GPS', IEEE Int. Ultrasonics Symp., 1992, p. 471–476.
    3. 3)
      • Lutsky, J.J.: `A sealed cavity thin-film acoustic resonator process for RF bandpass filters', 1997, PhD, Massachusetts Institute of Technology, Cambridge, MA, USA.
    4. 4)
      • Larson, J.D., Bradley, J.P., Wartenberg, S., Ruby, R.: `Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system', IEEE Int. Ultrasonics Symp., October 2000, p. 863–868.
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      • Y. Rahmat-Samii , E. Michielssen . (1999) Electromagnetic optimization by geneticalgorithms.
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      • V.M. Ristic . (1983) Principles of acoustic devices.
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