Continuous operation of SAW atomiser

Continuous operation of SAW atomiser

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Continuous operation of a surface acoustic wave (SAW) atomiser has been obtained for the first time. The atomiser consists of an unidirectional interdigital transducer and a pump fabricated on 128°YX LiNbO3 substrate. It was found, that at a frequency of 38.8 MHz, about 3 W of driving power was sufficient for continuous atomisation of water. Droplet diameter and atomising rate were about 6 µm and 0.3 ml/min, respectively.


    1. 1)
      • Kurosawa, M., Watanabe, T.A., Higuchi, T.: `Surface acoustic wave atomizer with pumping effect', Proc. Int. Conf. Micro-Electro-Mechanic. Systems, 1995, Amsterdam, The Netherlands, p. 25–30.
    2. 2)
    3. 3)
      • Kurosawa, M., Futumi, A., Higuchi, T.: `Characteristics of liquids atomization using surface acoustic wave', Proc. Int. Conf. Solid-State Sensors and Actuators, 1997, Chicago, IL, USA, p. 801–804.
    4. 4)

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