Nickel electroplated widely tunable micromachined capacitor

Nickel electroplated widely tunable micromachined capacitor

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Nickel electroplating is used to fabricate a widely tunable micromachined capacitor. From an initial capacitance of 0.7 pF, the device has a tuning ratio of 5.1:1 including parasitics: this is better than twice any previously reported figure for such devices. A process flow is presented which includes electrode surface roughening for stiction avoidance.


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