Selective Si interdiffusion into ion implanted GaAs from SiN encapsulation was observed and a GaAs MESFET with a highly conductive layer was developed using the interdiffusion. During the annealing of implanted 29Si at 950°C, Si was selectively diffused into the ion implanted region from SiN encapsulation and formed a highly conductive layer near the surface. The diffused Si improved the ohmic contact resistivity and electrical characteristics of the MESFET.
References
-
-
1)
-
K.L. Kavanagh ,
C.W. Magee ,
J. Sheets ,
J.W. Mayer
.
The interdiffusion of Si, P, and In at polysilicon/GaAs interfaces.
J. Appl. Phys.
,
4 ,
1845 -
1854
-
2)
-
S. Matsushita ,
S. Terada ,
E. Fujii ,
Y. Harada
.
Diffusion and doping of Si into GaAs from undoped SiOx/SiN film.
Appl. Phys. Lett.
,
2 ,
225 -
227
-
3)
-
K. Shinohara ,
Y. Yamashita ,
A. Endoh ,
K. Hikosaka ,
T. Matsui ,
T. Mimura ,
S. Hiyamizu
.
Ultra-speed pseudomorphic InAlAs/InGaAs HEMTs with 400-GHz cutoff frequency.
IEEE Electron. Device Lett.
,
11 ,
507 -
509
-
4)
-
D.C. Caruth ,
R.L. Shimon ,
M.S. Heins ,
H. Hsia ,
Z. Tang ,
S.C. Shen ,
D. Becher ,
J.J. Huang ,
M. Feng
.
Low-cost 38 and 77 GHz CPW MMICs using ion-implanted GaAs MESFETs.
IEEE MTT-S Int. Microw. Symp. Dig.
,
995 -
998
-
5)
-
T. Onuma ,
T. Hirao ,
T. Sugawa
.
Study of encapsulants for annealing Si-implanted GaAs.
J. Electrochem. Soc.
,
4 ,
837 -
840
-
6)
-
D.K. Sadana ,
J.P. De Souza ,
F. Cardone
.
N + doping of gallium arsenide by rapid thermal oxidation of a silicon cap.
Appl. Phys. Lett.
,
16 ,
1681 -
1683
-
7)
-
R.C. Keller ,
C.R. Helms
.
Oxidation enhanced diffusion of Si in GaAs: the effect of excess As on diffusion depth and carrier concentration.
Appl. Phys. Lett.
,
3 ,
398 -
400
-
8)
-
H. Hsia ,
Z. Tang ,
D. Caruth ,
D. Becher ,
M. Feng
.
Direct ion-implanted 0.12 µm GaAs MESFET with ft of 121 GHz and fmax of 160 GHz.
IEEE Electron. Device Lett.
,
4 ,
245 -
247
http://iet.metastore.ingenta.com/content/journals/10.1049/el_20020302
Related content
content/journals/10.1049/el_20020302
pub_keyword,iet_inspecKeyword,pub_concept
6
6