A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 µs. A crosstalk of −32 dB has been measured.
Inspec keywords: optical switches; optical polymers; silicon-on-insulator; microactuators; micro-optics; optical planar waveguides; optical crosstalk
Other keywords:
Subjects: Integrated optics; Optical waveguides; Micro-optical devices and technology; Optical bistability, multistability and switching; Micro-optical devices and technology; Integrated optics; Materials for MEMS and NEMS device technology; Electrical properties of metal-insulator-semiconductor structures; Optical materials; Optical communication devices, equipment and systems; Optical bistability, multistability and switching; Optical polymers and other organic optical materials; Optical waveguides and couplers; Multiplexing and switching in optical communication
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