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Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching

Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching

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Surface relief gratings have been fabricated on pure and Ti indiffused lithium niobate samples of x-cut and z-cut crystallographic orientations by a simple two-step process, which combines optical (pulsed ultra-violet laser) and chemical etching.

References

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      • J. Sochtig , H. Schutz , R. Widmer , H.W. Lehmann . Grating reflectors for erbium doped lithium niobate waveguide laser. Proc. SPIE , 98 - 107
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      • K. Chen , J. Ihlemann , P. Simon , I. Baumann , W. Sohler . Generation of submicron surface gratings on LiNbO3 by ultrashortUV laser pulses. Appl. Phys. A , 517 - 518
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      • B. Wu , P.L. Chu , H. Hu , Z. Xiong . UV-induced surface-relief gratings on LiNbO3 channel waveguides. IEEE J. Quantum Electron. , 1369 - 1373
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