Electrophoretically deposited zinc oxide thick film gas sensor
Fabrication of a ZnO gas sensor by electrophoretic deposition (EPD) is reported. EPD of submicron sized ZnO powder on an aluminium-chromium-iron alloy substrate was carried out in pure acetone. The porous thick film obtained was sintered at 1000°C in air. Native aluminium oxide layer grown on the alloy substrate insulated the sintered ZnO layer from the metal substrate. Operated at 250°C, the device showed a 20% conductance change in the presence of 10 ppm wood smoke.