ESD-induced degradation of vertical-cavity surface-emitting lasers

ESD-induced degradation of vertical-cavity surface-emitting lasers

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The sensitivity of proton implanted, vertical-cavity surface-emitting lasers (VCSELs) to electrostatic discharge (ESD) pulses is investigated under human body model test conditions. Rather low degradation threshold pulse amplitudes were observed in forward bias (+1500 V) as well as reverse bias (–800 V) step stress tests. Monitoring both the electrical and optical parameters of the VCSELs during ESD stress, it was found that in forward bias ESD stress tests the optical degradation precedes the electrical degradation.


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