Surface acoustic wave rotation motor

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Surface acoustic wave rotation motor

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Published

A novel surface acoustic wave rotation motor configuration is proposed. A 127.8° rotated y-cut LiNbO3 substrate is used as the stator. A specially designed disk is placed on the surface of the substrate and functions as the rotor. The motor successfully operates at a speed of 180 rpm.

Inspec keywords: surface acoustic wave devices; ultrasonic motors

Other keywords: surface acoustic wave rotation motor; LiNbO3 substrate; LiNbO3

Subjects: Acoustic wave devices; Piezoelectric motors

References

    1. 1)
      • Takasaki, M., Osakabe, N., Kurosawa, M.K., Higuchi, T.: `Miniaturization of acoustic wave linear motor', Proc. IEEE Ultrason. Symp., 1998, p. 679–682.
    2. 2)
      • M.K Kurosawa , M. Takahashi , T. Higuchi . Elastic contact conditions to optimize frictiondrive of surface acoustic wave motor. IEEE Trans. Ultrason. Ferroelect., Freq. Contr. , 5 , 1229 - 1237
    3. 3)
      • Moroney, R.M., White, R.M., Howe, R.T.: `Ultrasonic micromotors', Proc. IEEE Ultrason. Symp., 1989, p. 745–748.
    4. 4)
      • K. Nakamura , M. Kurosawa , H. Kurebayashi , S. Ueha . An estimation of loadcharacteristics of an ultrasonic motor by measuring transient responses. IEEE Trans. Ultrason. Ferroelect., Freq. Contr. , 5 , 481 - 485
    5. 5)
      • M. Kurosawa , M. Takahashi , T. Higuchi . Ultrasonic linear motor using surface acoustic waves. IEEE Trans. Ultrason. Ferroelect., Freq. Contr. , 5 , 901 - 906
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