Thick film PZT/micromachined silicon accelerometer

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Thick film PZT/micromachined silicon accelerometer

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Published

A novel accelerometer fabricated by a combination of screen-printing and silicon micromachining is reported. This is the first device of its kind fabricated in this manner. Initial results indicate a sensitivity of 16 pCg-1 which compares very favourably with a sensitivity of 0.15 pCg-1 reported for thin-film devices.

Inspec keywords: elemental semiconductors; accelerometers; micromachining; piezoelectric transducers; lead compounds; silicon; microsensors; thick film devices

Other keywords: sensitivity; screen printing; thick film PZT accelerometer; PZT-Si; fabrication; silicon micromachining; PbZrO3TiO3-Si

Subjects: Microsensors and nanosensors; Fabrication of MEMS and NEMS devices; Piezoelectric devices; Velocity, acceleration and rotation measurement

References

    1. 1)
      • M. Koch , N. Harris , R. Maas , A.G.R. Evans , N.M. White , A. Brunnschweiler . A novel micropump designed with thick film piezoelectric actuation. Meas. Sci. Technol. , 49 - 57
    2. 2)
      • R. De Reus , J.O. Gullov , P.R. Scheeper . Fabrication and characterization of a piezoelectric accelerometer. J. Micromech. Microeng. , 123 - 126
    3. 3)
      • R. Maas , M. Koch , N.R. Harris , N.M. White , A.G.R. Evans . Thick-film printing of PZT onto silicon. Mater. Lett. , 109 - 112
    4. 4)
      • S. Beeby , A. Blackburn , N.M. White . Processing of PZT piezoelectric thick films on silicon for micro electromechanical systems. J. Micromech. Microeng. , 3 , 218 - 229
    5. 5)
      • Harris, N., Koch, M., Beeby, S., White, N.M., Evans, A.G.R.: `Thick-film printing of PZT onto silicon for micromechanical applications', Proc. 9th Micromechanics Europe Workshop (MME '98), June 1998, Ulvik, Norway, p. 78–81.
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