ISFET sensor coupled with CMOS read-out circuit microsystem

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ISFET sensor coupled with CMOS read-out circuit microsystem

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The development of a prototype microsystem for measuring the pH, i.e. H+ ion concentration, of an aqueous electrolytic solution is described which has a resolution higher than 1/20 of pH. The microsystem is composed of an ion sensitive field effect transistor (ISFET) sensor coupled with a CMOS read-out channel capable of providing a low-impedance analogue output and protection against electrostatic discharges. The silicon integrated ISFET sensor chip and the CMOS read-out chip have been fabricated, packaged and successfully tested at the IRST-Microsystem Division of Trento (Italy) using the internal microfabrication facility.

Inspec keywords: electrolytes; pH measurement; CMOS integrated circuits; electrostatic discharge; microsensors; readout electronics; ion sensitive field effect transistors

Other keywords: electrostatic discharge protection; silicon integrated chip; CMOS read-out circuit microsystem; ion sensitive field effect transistor; microfabrication; pH measurement; ISFET sensor; H+ ion concentration; aqueous electrolytic solution

Subjects: CMOS integrated circuits; Insulated gate field effect transistors; Chemical sensors; Chemical variables measurement; Microsensors and nanosensors

References

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      • M. Grattarola , G. Massobrio , S. Martinoia . Modelling H+-sensitive FETs with SPICE. IEEE Trans. , 4 , 813 - 819
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      • P. Bergveld . Development of an ion-sensitive solid-state device for neurophysiologicalmeasurements. IEEE Trans. , 70 - 71
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      • Lui, A., Margesin, B., Zanini, V., Zen, M., Soncini, C., Martinoia, S.: `A test chip for ISFET/CMNOS technology development', Proc. 1996 IEEE Int. Conf. Microelectronic Test Structures, March 1996, 9, p. 70–71.
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      • D.A. Johns , K. Martin . (1997) Analog integrated circuit design.
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