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Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators

Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators

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A new comb finger design which enhances the operational performance of the commonly used electrostatic comb-drive actuator is presented. The angled comb finger design is discussed and shown experimentally to produce a greater actuating force than conventional rectangular comb fingers. Displacements up to twice as large as that achieved using rectangular comb fingers are shown for the same applied voltage.

References

    1. 1)
      • I. Fujimasa . (1996) Micromachines : A new era in mechanical engineering.
    2. 2)
      • Kim, C.-J., Pisano, A.P., Muller, R.S., Lim, M.G.: `Polysilicon microgripper', Tech. Dig., IEEE Solid-State Sensor and Actuators Workshop, June 1990, Hilton Head, p. 48–51.
    3. 3)
      • J.J. Sniegowski , E.J. Garcia . Surface-micromachined gear trains driven by an on-chip electrostaticmicro-engine. IEEE Electron. Device Lett. , 366 - 368
    4. 4)
      • Yun, W., Howe, R.T., Gray, P.R: `Surface micromachined digitally force balanced accelerometer with integratedCMOS detection circuitry', Tech. Dig., IEEE Solid-State Sensor and Actuator Workshop, June 1992, Hilton Head, p. 126–131.
    5. 5)
      • Rosa, M.A., Dimitrijev, S., Harrison, H.B.: `Improved operation of microelectromechanical comb-drive actuators throughthe use of a new angled comb finger design', SPIE Conf: Smart Materials, structures and MEMS (Oral Presentation), 1997, 3242, p. 212–218.
    6. 6)
      • M.A. Rosa , S. Dimitrijev , H.B. Harrison . Avoidance of stiction in the release of highly boron doped micro-actuatorsfabricated using BESOI substrates. Microelectron. Reliability
    7. 7)
      • W. Ye , S. Mukherjee , N.C. MacDonald . Optimal shape design of an electrostatic comb drive in microelectromechanicalsystems. J. Microelectromech. Syst. , 1 , 16 - 26
    8. 8)
      • Yao, J.J., Arney, S.C., MacDonald, N.C.: `Fabrication of high frequency two-dimensional nanoactuators for scannedprobe devices', Proc. IEEE MEMS, 1992, p. 14–22.
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