Integrated array of gas sensors
Integrated array of gas sensors
- Author(s): V.I. Anisimkin ; R.G. Krystal ; A.V. Medved ; E. Verona ; V.E. Zemlyakov
- DOI: 10.1049/el:19980927
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- Author(s): V.I. Anisimkin 1 ; R.G. Krystal 1 ; A.V. Medved 1 ; E. Verona 2 ; V.E. Zemlyakov 1
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View affiliations
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Affiliations:
1: Institute of Radioengineering and Electronics, Russian Academy of Sciences,, Moscow, Russia
2: Institute of Radioengineering and Electronics, C.N.R. Istituto di Acustica O.M. Corbino, Rome, Italy
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Affiliations:
1: Institute of Radioengineering and Electronics, Russian Academy of Sciences,, Moscow, Russia
- Source:
Volume 34, Issue 13,
25 June 1998,
p.
1360 – 1361
DOI: 10.1049/el:19980927 , Print ISSN 0013-5194, Online ISSN 1350-911X
A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction.
Inspec keywords: surface acoustic wave sensors; gas sensors; pattern recognition
Other keywords:
Subjects: Chemical sensors; Measurement by acoustic techniques; Chemical variables measurement; Chemical sensors; Acoustic wave devices
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