10 GHz range extremely low-loss surface acoustic wave filter

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10 GHz range extremely low-loss surface acoustic wave filter

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A low-loss 10 GHz range surface acoustic wave (SAW) filter is investigated. It is fabricated on 128° Y-X LiNbO3 using electron beam direct writing and a lift-off process (aluminium electrode width = 95 nm, thickness = 30 nm). Experimental results of the ladder type SAW filter show low loss characteristics. A minimum insertion loss of 3.4 dB in the 10 GHz range is obtained.

Inspec keywords: ladder filters; electron beam lithography; lithium compounds; surface acoustic wave filters; electrodes

Other keywords: ladder type filter; low loss characteristics; electron beam direct writing; 30 nm; 3.4 dB; LiNbO3; 10 GHz; electrode width; surface acoustic wave filter; lift-off process; 95 nm; minimum insertion loss

Subjects: Passive filters and other passive networks; Acoustic wave devices

References

    1. 1)
      • T. Nishihara , H. Uchishiba , O. Ikata , Y. Satoh . Improved power durability of surface acoustic wave filters for antennaduplexers. Jpn. J. Appl. Phys. , 2688 - 2692
    2. 2)
      • Yamanouchi, K.: `GHz-range SAW device using nano-meter electrode fabrication technology', IEEE Ultrasonics Symp. Proc., 1994, 1, p. 421–426.
    3. 3)
      • H. Odagawa , T. Meguro , K. Yamanouchi . 5 GHz range low-loss wide band surface acoustic wave filters using electrodethickness difference type unidirectional transducers. Jpn. J. Appl. Phys. , 3028 - 3031
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