Integrated micro-optomechanical laser beam deflector

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Integrated micro-optomechanical laser beam deflector

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Published

A laser beam microdeflector which is fully integrated on a silicon substrate is presented. The design combines a steering system of cylindrical microlenses and a set of electrostatic combs. Both mechanical and optical parts are etched into a silica layer to provide a simple technological process and widen the operational wavelength range. Furthermore, the design, associated with silicon surface micromachining technology, enables more than 700 chips to be produced on a 100 mm diameter wafer.

Inspec keywords: optical fabrication; integrated optics; micromachining; lenses; electrostatic devices; silicon; microactuators; laser accessories

Other keywords: Si-SiO2; Si surface micromachining technology; electrostatic combs; integrated laser beam deflector; micro-optomechanical deflector; cylindrical microlenses; SiO2; steering system; microdeflector; silica layer; laser beam deflector; Si substrate

Subjects: Laser beam characteristics and interactions; Integrated optics; Optical lens and mirror systems; Laser accessories and instrumentation; MEMS and NEMS device technology; Electrostatic devices; Optical fabrication, surface grinding; Integrated optics

References

    1. 1)
      • E. Ollier , P. Mottier . Integrated electrostatic micro-switch for optical fibre networks drivenby low voltage. Electron. Lett. , 21 , 2007 - 2009
    2. 2)
      • Ikeda, M., Goto, H., Sakata, M., Wakabayashi, S., Imanaka, K., Takeushi, M., Yada, T.: `Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor', Transducers'95-Eurosensors IX, 1995, Stockholm, Sweden.
    3. 3)
      • Tien, N.C., Solgaard, O., Kiang, M.-H., Daneman, M., Lau, K.Y., Muller, R.S.: `Surface micromachined micromirrors for laser-beam positioning', Transducers'95-Eurosensors IX, 1995, Stockholm, Sweden.
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