Piezoelectric KNbO3 films for SAW device applications

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Piezoelectric KNbO3 films for SAW device applications

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KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960 MHz and λ/h = 0.24 (λ = SAW wavelength, h = KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals.

Inspec keywords: potassium compounds; surface acoustic wave devices; piezoelectric thin films; CVD coatings

Other keywords: MOCVD; KNbO3; SAW device; electromechanical coupling coefficient; piezoelectric KNbO3 film; 960 MHz; SrTiO3; piezoelectric constant; STO substrate

Subjects: Chemical vapour deposition; Acoustic wave devices; Piezoelectric and ferroelectric materials

References

    1. 1)
      • W. Mu-Shiang , W. Shin . Propagation characteristics of surface acoustic waves in KNbO3/SrTiO3/Silayered structures. Jpn. J. Appl. Phys., Part 1 , 2192 - 2195
    2. 2)
      • K. Yamanouchi , H. Odagawa , T. Kojima , T. Matsumura . Theoretical and experimental study of super-high electromechanical couplingsurface acoustic wave propagation in KNbO3 single crystal. Electron. Lett. , 3 , 193 - 194
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19980475
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