Piezoelectric KNbO3 films for SAW device applications
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KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960 MHz and λ/h = 0.24 (λ = SAW wavelength, h = KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals.