High spatially resolved MMIC-internal millimetre-wave measurements of sinusoidal signals by high frequency electric force microscope-testing

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High spatially resolved MMIC-internal millimetre-wave measurements of sinusoidal signals by high frequency electric force microscope-testing

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A recently developed high frequency electric force microscope (HF-EFM) test system combines both high spatial and temporal resolution, and enables functional probing and failure analysis of monolithic microwave- and millimetre-wave integrated circuits (MMICs) on wafer. It has previously been shown that this test system is capable of detecting pulse shaped signals up to 100 GHz on a 1 µm transistor gate, by using nonlinear transmission lines as signal generators. For realising the possibility of testing MMIC-internal devices in normal working conditions, this test system is improved by using millimetre-wave generators as signal sources in order to allow the system to measure sinusoidal signals. For the first time, the test system was used for measurements of sinusoidal milliwave-wave signals on different MMICS at frequencies up to 110 GHz, simultaneously achieving a spatial resolution better than 2 µm.

Inspec keywords: MMIC; millimetre wave measurement; microwave measurement; MIMIC; probes; signal generators; integrated circuit testing; failure analysis; microscopy

Other keywords: monolithic microwave integrated circuits; sinusoidal signals; nonlinear transmission lines; signal generators; temporal resolution; spatial resolution; monolithic millimetre-wave integrated circuits; MMIC-internal devices; pulse shaped signals; millimetre-wave generators; functional probing; high frequency electric force microscope; failure analysis; 3 to 110 GHz

Subjects: Testing; Maintenance and reliability; Reliability; Microwave measurement techniques; Semiconductor integrated circuits; Microwave integrated circuits; Measurement

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