High power-durable RF-band SAW filters using single-crystal Al/Ti electrodes grown on 64°Y-X LiNbO3 substrates
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To improve the power-durability of RF-band SAW filters, single-crystal Al/Ti electrode films were successfully grown on 64°Y-X LiNbO3 substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes.