Thick-film acoustic wave sensor structure

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Thick-film acoustic wave sensor structure

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The scope for thick-film sensor development has largely been limited by the lack of special-purpose sensing pastes. Using a new piezoelectric thick-film we have developed a novel acoustic wave sensor which allows an expansion of the technology into areas previously overlooked.

Inspec keywords: piezoelectric transducers; detectors; acoustoelectric transducers; thick film devices

Other keywords: acoustic wave sensor structure; thick-film sensor; piezoelectric thick-film

Subjects: Acoustic wave devices; Sensing devices and transducers; Acoustical measurements and instrumentation; Transducers; Sonic and ultrasonic transducers and sensors; Sensing and detecting devices

References

    1. 1)
      • R.H. Tancrell , M.G. Holland . Acoustic surface wave filters. Proc. IEEE , 3 , 393 - 409
    2. 2)
      • J.E. Brignell , N.M. White , A.W.J. Cranny . Sensor applications of thick-film technology. IEE Proc. I , 4 , 77 - 84
    3. 3)
      • Baudry, H.: `Screeen printing piezoelectric devices', Proc. 6th Europ. Microel. Conf., 1987, Bournemouth, p. 456–463.
    4. 4)
      • Morten, B., de Cicco, G., Gandolfi, A., Tonelli, C.: `Advances in ferroelectric thick-film materials and sensors', Proc. 8th Europ. Microel. Conf., 1991, Rotterdam, p. 392–399.
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19931202
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