http://iet.metastore.ingenta.com
1887

Monolithic integration of GaAs MSM photodetector and SiO2/Si3N4 dielectric optical waveguide

Monolithic integration of GaAs MSM photodetector and SiO2/Si3N4 dielectric optical waveguide

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A photonic integrated circuit is presented that comprises a GaAs metal-semiconductor-metal and an SiO2/SiN4 dielectric optical waveguide made on a GaAs substrate. A grating is used for light injection and coupling with the detector is achieved using the evanescent field coupling technique.

References

    1. 1)
      • S. Sriram , W.D. Partlow , C.S. Liu . Low-loss optical wave-guides using plasma deposited silicon nitride. Appl. Opt. , 23 , 3664 - 3665
    2. 2)
      • C.H. Henry , R.F. Kazarinov , H.J. Lee , J. Orlowsky , E. Katz . Low loss Si3N4–SiO2 optical waveguide on Si. Appl. Opt. , 13 , 2621 - 2624
    3. 3)
      • J.F. Vinchant , F. Mallecot , D. Decoster , J.P. Vilcot . Photodetectors monolithically integrated with optical waveguides: theoretical experimental study of absorbing layer effects. IEE Proc. J , 1 , 72 - 75
    4. 4)
      • S. Valette , S. Renard , H. Denis , J.P. Jadot , A. Fournier , P. Philippe , P. Gidon , A.M. Grouillet , E. Desgranoes . Si-based integrated optics technologies. Solid State Technol. , 69 - 75
    5. 5)
      • R. Baets , P.E. Lagasse . Calculation of radiation loss in integrated-optic tapers Y-junctions. Appl. Opt. , 11 , 1972 - 1978
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19920032
Loading

Related content

content/journals/10.1049/el_19920032
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address