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Electron beam controlled latch operating under electron beam testing conditions

Electron beam controlled latch operating under electron beam testing conditions

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The principle of a latch controlled by an electron beam is presented. Based on experimental results, electron beam switching (active role) and electron beam testing (passive role) are demonstrated and conditions for E-beam sensitivity of the latch are discussed.

References

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      • E. Wolfgang . Electron beam testing. Microelectron. Eng. , 77 - 106
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      • D.C. Shaver . Techniques for electron beam testing and restructuring integrated circuits. J. Vac. Sci. & Technol. , 4 , 1010 - 1013
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      • P. Girard , P. Nouet , B. Pistoulet . Single energy e-beam latch activation and deactivation. Microelectron. Eng. , 129 - 133
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      • P. Nouet , P. Girard , B. Pistoulet . Towards improvements on VLSI circuit reconfiguration: a new E-beam activated cell operating in the E.B.T. conditions, Defect and fault tolerance in VLSI systems III.
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