Electron beam controlled latch operating under electron beam testing conditions

Electron beam controlled latch operating under electron beam testing conditions

For access to this article, please select a purchase option:

Buy article PDF
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Your details
Why are you recommending this title?
Select reason:
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

The principle of a latch controlled by an electron beam is presented. Based on experimental results, electron beam switching (active role) and electron beam testing (passive role) are demonstrated and conditions for E-beam sensitivity of the latch are discussed.


    1. 1)
      • E. Menzel , E. Kubalek . Fundamentals of electron beam testing of integrated circuits. Scanning , 103 - 122
    2. 2)
      • E. Wolfgang . Electron beam testing. Microelectron. Eng. , 77 - 106
    3. 3)
      • D.C. Shaver . Techniques for electron beam testing and restructuring integrated circuits. J. Vac. Sci. & Technol. , 4 , 1010 - 1013
    4. 4)
      • S. Görlich , E. Kubalek . E-beam induced damage on passivated metal oxide semiconductor devices. Scanning Electron Microsc , 87 - 95
    5. 5)
      • P. Girard , P. Nouet , B. Pistoulet . Single energy e-beam latch activation and deactivation. Microelectron. Eng. , 129 - 133
    6. 6)
      • P. Nouet , P. Girard , B. Pistoulet . Towards improvements on VLSI circuit reconfiguration: a new E-beam activated cell operating in the E.B.T. conditions, Defect and fault tolerance in VLSI systems III.

Related content

This is a required field
Please enter a valid email address