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Planar 1/8 splitter in glass by photoresist masked silver film ion exchange

Planar 1/8 splitter in glass by photoresist masked silver film ion exchange

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Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.

http://iet.metastore.ingenta.com/content/journals/10.1049/el_19910829
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