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Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers

Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers

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The fabrication and characterisation of two-dimensional phase-locked arrays of vertical cavity surface emitting lasers is reported. The three two-dimensional array structures characterised were a 2 × 3 periodic array of 10μm2 lasers, a hexagonal array and a centred hexagonal array of 5 μm hexagonal lasers. All arrays were fabricated using the same technique which was a combination of mesa etching and oxygen implantation isolation.

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