Reliable 1.3 μm gain guided stripe lasers grown by MOCVD using ethyldimethylindium as the In source

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Reliable 1.3 μm gain guided stripe lasers grown by MOCVD using ethyldimethylindium as the In source

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© The Institution of Electrical Engineers
Published

The first semiconductor laser in the GalnAsP materials system grown by MOCVD using ethyldimethylindium as the In source is reported. A 1.3 μm gain guided stripe laser structure with 5 μm wide stripes was fabricated. The devices showed excellent reliability, with negligible degradation measured during life testing at 50°C and 60°C over a period of 16000 h.

Inspec keywords: gallium compounds; indium compounds; reliability; life testing; gallium arsenide; vapour phase epitaxial growth; III-V semiconductors; semiconductor junction lasers

Other keywords: 60 C; reliability; 50 C; 16000 h; GaInAsP; semiconductor laser; 5 micron; ethyldimethylindium; gain guided stripe lasers; life testing; negligible degradation; MOCVD; 1.3 micron

Subjects: Reliability; Optoelectronics manufacturing; II-VI and III-V semiconductors; Maintenance and reliability; Testing; Lasing action in semiconductors; Production facilities and engineering; Surface treatment and coating techniques; Epitaxial growth; Semiconductor lasers; Design of specific laser systems

References

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      • K.L. Fry , C.P. Kuo , C.A. Larson , R.M. Cohen , G.B. String-Fellow . OMVPE growth of InP and Ga0.47In0.53As using ethyldimethylindium. J. Electron. Mater. , 91 - 96
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      • N. Puetz , G. Hillier , A.J. Springthorpe . The inverted horizontal reactor: growth of uniform InP and GaInAs by LPMOCVD. J. Electron. Mater. , 381 - 386
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      • P.K. York , K.J. Beernink , J. Kim , J.J. Coleman , G.E. Fernandez , C.M. Wayman . Ethyldimethylindium for the growth of InGaAs-GaAs strained-layer lasers by metalorganic chemical vapor deposition. Appl. Phys. Lett. , 2476 - 2478
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      • K.D. Chik . Analysis of the effects of recombination and leakage on the static properties of GaInAsP/InP stripe geometry lasers. J. Appl. Phys. , 2507 - 2513
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