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Doping level anomalies in p-InP resulting from exposure to dopant precursors during cool-down in MOVPE

Doping level anomalies in p-InP resulting from exposure to dopant precursors during cool-down in MOVPE

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Large dopant deactivation effects occur when p-InP is cooled in ambients containing DMZn. This does not appear to be the result of hydrogen passivation, rather we believe it to be caused by the presence of high concentrations of interstitial donors.

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