Surface-acoustic-wave unidirectional transducers using anodic oxidation technology and low-loss filters

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Surface-acoustic-wave unidirectional transducers using anodic oxidation technology and low-loss filters

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© The Institution of Electrical Engineers
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A new surface-acoustic-wave interdigital transducer (IDT) and unidirectional transducer (UDT) are described. Using a lift-off anodic oxidation method, controllable gaps between electrodes with good insulation can be obtained. Experimental results show good characteristics at 2nd-harmonic operation for a new floating electrode type unidirectional transducer (NG-FEUDT). Also, a low-loss filter of 3.46dB with side-lobe suppression of 40dB at 893 MHz is obtained using the above techniques.

Inspec keywords: ultrasonic transducers; surface acoustic wave filters; surface acoustic wave devices

Other keywords: unidirectional transducer; anodic oxidation technology; side-lobe suppression; low-loss filters; floating electrode type; 2nd-harmonic operation; surface-acoustic-wave interdigital transducer; NG-FEUDT

Subjects: Sonic and ultrasonic transducers and sensors; Acoustic wave devices

References

    1. 1)
      • K. Yamanouchi , H. Furuyashiki . New low-loss SAW filter using internal floating electrode reflection types of single-phase unidirectional transducer. Electron. Lett. , 989 - 990
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19890641
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