Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing

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Ultrasonic experiments with lead zirconate titanate thin films fabricated by sol gel processing

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© The Institution of Electrical Engineers
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Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.

Inspec keywords: acoustic microscopy; lead compounds; ultrasonic transducers; sol-gel processing; surface acoustic waves

Other keywords: sol gel processing technique; SAW; piezoelectricity; US; poling; acoustic images; scanning acoustic microscope; PbZrO3TiO3; acoustic properties; PZT; bulk acoustic wave measurements

Subjects: Sonic and ultrasonic transducers and sensors; Acoustic wave devices

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