© The Institution of Electrical Engineers
Surface and bulk acoustic wave measurements with lead zirconate titanate (PZT) thin films fabricated by a sol gel processing technique are reported for the first time. The piezoelectricity of such films was achieved by poling. Good acoustic properties of these films are confirmed by the acoustic images and V(z) curves obtained by a scanning acoustic microscope.
References
-
-
1)
-
H. Adachi ,
T. Mitsuyu ,
K. Wasa
.
SAW properties of PLZT epitaxial thin films.
Jpn. J. Appl. Phys.
,
121 -
123
-
2)
-
E.V. Sviridov ,
V.I. Mukhortov ,
V.P. Dudkevich ,
E.G. Fesenko
.
Ferroelectric properties of Pb(Zr, Ti)O3 films grown by RF cathode sputtering.
Sov. Phys. Tech. Phys.
,
576 -
577
-
3)
-
J. Fukushima ,
K. Kodaira ,
T. Matsushita
.
Preparation of ferroelectric PZT films by thermal decomposition of organometallic compounds.
J. Mat. Sci.
,
595 -
598
-
4)
-
K. Sreenivas ,
M. Sayer ,
C.K. Jen ,
K. Yamanaka
.
(1988)
Bulk and surface acoustic wave transduction in sputtered lead zirconate titanate thin films, Proc. Ultrasonics Symp..
-
5)
-
K. Sreenivas ,
M. Sayer ,
D. Baar ,
M. Nishioka
.
Surface acoustic wave propagation on lead zirconate titanate thin films.
Appl. Phys. Lett.
,
709 -
711
-
6)
-
K.D. Budd ,
S.K. Dey ,
D.A. Payne
.
Sol-gel processing of PbTiO3, PZT, and PLZT thin films.
British Ceramic Proc.
,
109 -
121
-
7)
-
R.D. Weglein
.
A model for predicting acoustic material signatures.
J. Appl. Phys.
,
179 -
181
-
8)
-
J. Kushibiki ,
N. Chubachi
.
Material characterisation by line-focus-beam acoustic microscope.
IEEE Trans. Sonics and Ultrason.
,
189 -
212
-
9)
-
C.K. Jen ,
C.J. Chung ,
G. Shapiro ,
J.-P. Monchalin ,
P. Langlois ,
I.F. Bussiere
.
Acoustic characterization of poling effects in PZT ceramics.
J. Am. Ceram. Soc.
,
C256 -
C259
-
10)
-
G. Yi ,
Z. Wu ,
M. Sayer
.
Perparation of Pb(Zr, Ti)O3 thin film by sol gel processing: electrical, optical and electro-optic properties.
J. Appl. Phys.
,
2717 -
2724
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19890214
Related content
content/journals/10.1049/el_19890214
pub_keyword,iet_inspecKeyword,pub_concept
6
6